Structural design points in arrayed micro thermal sensors (II) ~ Experimental verification
Maret 2017
Hirofumi Miki, S. Tsuchitani

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Previously, we reported the structural design points in arrayed micro thermal sensors by utilizing electrical-thermal analogies and simulation analysis. In this paper, the applicable structure of arrayed micro thermal sensor are discussed based on our previous results of simulation analysis, and demonstrated the effectiveness of the design points experimentally using fabricated prototype that based on silicon approach.

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Metrik

  • Eye Icon 45 kali dilihat
  • Download Icon 13 downloads
Metrics Icon 45 kali dilihat  //  13 downloads