Learning tools are the most important part of the learning process, where the learning process runs efficiently, effectively and is structured because of the learning tools. The learning tools developed are in the form of guided inquiry learning models which are based on the syllabus, lesson plans, student worksheet, and concept mastery test instruments. The purpose of this research is to develop valid, effective, and efficient physics learning tools by using guided inquiry models on the material of optical tools to improve concept mastery. This study uses a Research and Development (R&D) type of research with a 4D model consisting of four stages, namely Define, Design, Develop, and Disseminate. The tools developed in this study were the syllabus, lesson plans, student worksheet, and concept mastery test instruments. The validity of the developed device was obtained based on a questionnaire assessment of six validators, namely three expert validators and three practitioner validators, then the validity of the devices was analyzed using a Likert scale. The effectiveness of the device was obtained based on the analysis of the RPP implementation observation sheet from three observers which was then determined using the calculation of the Interjudge Agreement (IJA) and the acquisition of the N-Gain value. Furthermore, the efficiency of the device was obtained from the limited trial results for class XI students which was then determined from the responses of the teacher and students. So it can be concluded that the learning tools developed are effective. Finally, from the responses of teachers and students, there are several obstacles from the learning that has been done so that the guided inquiry learning model is less efficient for use in learning.