Semarang is one of the densely populated city in Central Java which is has a dense population arounds 1,739,989 inhabitants in a total area of 373,70 km2. In geographic composition, Semarang city has two major area characteristic where is a lowlands area dominated with a coastal area and the plateu area lies on highland hills. Also Semarang city has also has a Kaligarang fault where is lie in Kaligarang River. The position of Kaligarang river itself divides in the direction nearly north-south city of Semarang. The impact of the fault Kaligarang can be seen in several places such as a land subsidence phenomenon in Tinjomoyo village area such as several house destruction.In this research, we have used several methods and observations such as InSAR, DinSAR and geomorphology where is this techniques used to identify the fault area and estimate Kaligarang's fault movement velocity. Selection of the use of remote sensing techniques due to the ability to conduct an assessment of a large region with a fast time. The data used in this study of three ALOS PALSAR level 1.0 which was acquired on June 8, 2007, July 26, 2008, and 10 of September 2009. Besides that third ALOS PALSAR earlier, also used data of SRTM DEM 4th version, is used for the correction of the topography. The use of the three methods already mentioned earlier have different functions. For the InSAR method used for the establishment of a digital model in Semarang. After getting high models digital city of Semarang, the identification process can be done layout, length, width and area of the fault Kaligarang using geomorphology. Results of such identification can be calculated using the rate of deformation DinSAR method, by using the method of estimation can be done DinSAR Kaligarang fault movement. From the result generated DinSAR method of land subsidence rate between 3 cm to 11 cm. To know the truth measurement that used DinSAR method, is performed with the decline of validation that measured using GPS. After validating obtained standard deviation of 3,073 cm. To determine the type of fault and the fault direction is donethe method of geomorphology nd the results obtined fault geomorphology study kaligarang an active fault that include type of fault strike slip fault.In this study, the rate of decline can be conclude that Kaligarang fault deformation range from 3 cm to 11 cm obtined the type of fault is a strike slip fault. It makes this study is important, this study could be used as an initial action on disaster mitigation in the area surrounding the fault Kaligarang.